Diffusion barrier with reactively sputtered TiN for thermally stable contact

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作者：
Mitsuhashi, Katsunori [1 ]
Yamazaki, Osamu [1 ]
Ohtake, Koui [1 ]
Koba, Masayoshi [1 ]
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[1] Sharp Corp, Japan
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| 1600年 / 27期
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