CONTROL-SYSTEM DYNAMICS USING GLOW-DISCHARGE MASS-SPECTROSCOPY FOR THIN-FILM SPUTTERING

被引：5

作者：

BOLKER, BFT ^{[1
]}

TISONE, TC ^{[1
]}

LATOS, TS ^{[1
]}

机构：

[1] GOULD LABS,ROLLING MEADOWS,IL 60008

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期

关键词：

D O I：

10.1116/1.570752

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：328 / 334

页数：7

共 37 条

[1] CLOSED-LOOP CONTROL OF THIN-FILM SPUTTER DEPOSITION PROCESSES USING GLOW-DISCHARGE MASS-SPECTROSCOPY
TISONE, TC
BOLKER, BFT
LATOS, TS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 415 - 419
[2] INORGANIC THIN-FILM BY GLOW-DISCHARGE TECHNIQUE
HORIGUCHI, K
SENDA, A
KURATA, K
JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, : A856 - A856
[3] CHARACTERIZATION OF BCS CERAMIC STANDARDS BY GLOW-DISCHARGE MASS-SPECTROSCOPY
ALSOP, C
CLARK, J
RONAN, G
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE, 1989, 334 (07): : 677 - 677
[4] GLOW-DISCHARGE POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS
HIRAI, Y
OSADA, Y
KOMATSU, T
OMATA, S
AIHARA, K
NAKAGIRI, T
APPLIED PHYSICS LETTERS, 1983, 42 (08) : 701 - 703
[5] REAL-TIME SPUTTER DEPOSITION MONITORING USING GLOW-DISCHARGE MASS-SPECTROSCOPY
BOLKER, BFT
SOLID STATE TECHNOLOGY, 1983, 26 (12) : 115 - 119
[6] A MASS-SPECTROSCOPY STUDY OF THE STABLE PRODUCTS FROM THE DECOMPOSITION OF MONOSILANE IN A GLOW-DISCHARGE
SLOVETSKII, DI
KOCHKA, Y
STUKHLIK, I
HIGH ENERGY CHEMISTRY, 1983, 17 (05) : 371 - 373
[7] OPTICAL SPECTROSCOPY FOR GLOW-DISCHARGE SPUTTERING DIAGNOSTICS AND PROCESS-CONTROL
GREENE, JE
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 203 - 204
[8] MECHANISMS AND KINETICS STUDY OF POLYMERIC THIN-FILM DEPOSITION IN GLOW-DISCHARGE
LAM, DK
BADDOUR, RF
STANDELL, AF
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1975, (169): : 14 - 14
[9] MECHANISMS AND KINETICS STUDY OF POLYMERIC THIN-FILM DEPOSITION IN GLOW-DISCHARGE
LAM, DK
BADDOUR, RF
STANCELL, AF
JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1976, A 10 (03): : 421 - 450
[10] MASS SPECTROMETRY OF BACKGROUND GASES IN GLOW-DISCHARGE SPUTTERING OF TANTALUM THIN FILMS
SOSNIAK, J
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (02): : 87 - &

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