REAL-TIME SPUTTER DEPOSITION MONITORING USING GLOW-DISCHARGE MASS-SPECTROSCOPY

被引：0
|
作者：
BOLKER, BFT
机构：
来源：
SOLID STATE TECHNOLOGY | 1983年 / 26卷 / 12期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：115 / 119
页数：5
相关论文
共 50 条
  • [1] GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MONITORING SPUTTER DEPOSITION
    SEQUEDAO.F
    GREENE, JE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 174 - 174
  • [2] CLOSED-LOOP CONTROL OF THIN-FILM SPUTTER DEPOSITION PROCESSES USING GLOW-DISCHARGE MASS-SPECTROSCOPY
    TISONE, TC
    BOLKER, BFT
    LATOS, TS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 415 - 419
  • [3] CHARACTERIZATION OF BCS CERAMIC STANDARDS BY GLOW-DISCHARGE MASS-SPECTROSCOPY
    ALSOP, C
    CLARK, J
    RONAN, G
    FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE, 1989, 334 (07): : 677 - 677
  • [4] GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MONITORING SPUTTER DEPOSITED FILM THICKNESS
    GREENE, JE
    SEQUEDAO.F
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1144 - 1149
  • [5] SPUTTER DEPOSITION OF ZNO THIN-FILMS USING GLOW-DISCHARGE MASS-SPECTROMETRY
    AITA, CR
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1981, 28 (05): : 393 - 393
  • [6] A MASS-SPECTROSCOPY STUDY OF THE STABLE PRODUCTS FROM THE DECOMPOSITION OF MONOSILANE IN A GLOW-DISCHARGE
    SLOVETSKII, DI
    KOCHKA, Y
    STUKHLIK, I
    HIGH ENERGY CHEMISTRY, 1983, 17 (05) : 371 - 373
  • [7] CONTROL-SYSTEM DYNAMICS USING GLOW-DISCHARGE MASS-SPECTROSCOPY FOR THIN-FILM SPUTTERING
    BOLKER, BFT
    TISONE, TC
    LATOS, TS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 328 - 334
  • [8] OPTICAL SPECTROSCOPY FOR DIAGNOSTICS AND PROCESS-CONTROL DURING GLOW-DISCHARGE ETCHING AND SPUTTER DEPOSITION
    GREENE, JE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (05): : 1718 - 1729
  • [9] SECONDARY-ION MASS-SPECTROSCOPY ANALYSIS FOR ALUMINUM SURFACES TREATED BY GLOW-DISCHARGE CLEANING
    CHEN, JR
    HSIUNG, GY
    LIU, YC
    LEE, WH
    NEE, CC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03): : 562 - 570
  • [10] INSITU GLOW-DISCHARGE DIAGNOSTICS USING FTIR SPECTROSCOPY
    CLELAND, TA
    HESS, DW
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C450 - C450
12345