REAL-TIME SPUTTER DEPOSITION MONITORING USING GLOW-DISCHARGE MASS-SPECTROSCOPY

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作者：
BOLKER, BFT
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来源：
SOLID STATE TECHNOLOGY | 1983年 / 26卷 / 12期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：115 / 119
页数：5
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