GLOW-DISCHARGE POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS

被引:20
|
作者
HIRAI, Y
OSADA, Y
KOMATSU, T
OMATA, S
AIHARA, K
NAKAGIRI, T
机构
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D O I
10.1063/1.94078
中图分类号
O59 [应用物理学];
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页码:701 / 703
页数:3
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