OPTICAL SPECTROSCOPY FOR GLOW-DISCHARGE SPUTTERING DIAGNOSTICS AND PROCESS-CONTROL

被引：5
|
作者：
GREENE, JE
机构：
[1] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期
关键词：
D O I：
10.1116/1.569478
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：203 / 204
页数：2
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