MECHANISMS AND KINETICS STUDY OF POLYMERIC THIN-FILM DEPOSITION IN GLOW-DISCHARGE

被引：0

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作者：

LAM, DK

BADDOUR, RF

STANDELL, AF

机构：

[1] MIT,CHEM ENGN DEPT,CAMBRIDGE,MA 02139

[2] MOBILE CHEM CO,EDISON,NJ 00817

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1975年 / 169期

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D O I：

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中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

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页码：14 / 14

页数：1

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