SCANNING-ELECTRON-MICROSCOPE-WRITTEN GRATINGS IN CHALCOGENIDE FILMS FOR OPTICAL INTEGRATED-CIRCUITS

被引：22
|
作者：
HANDA, Y
SUHARA, T
NISHIHARA, H
KOYAMA, J
机构：
来源：
APPLIED OPTICS | 1979年 / 18卷 / 02期
关键词：
D O I：
10.1364/AO.18.000248
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：248 / 252
页数：5
相关论文
共 50 条
  • [21] DESIGN AND SIMULATION OF OPTICAL INTEGRATED-CIRCUITS
    KOSHIBA, M
    ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 1994, 77 (11): : 15 - 24
  • [22] MOISTURE DIFFUSION IN POLYIMIDE FILMS IN INTEGRATED-CIRCUITS
    DENTON, DD
    DAY, DR
    PRIORE, DF
    SENTURIA, SD
    ANOLICK, ES
    SCHEIDER, D
    JOURNAL OF ELECTRONIC MATERIALS, 1985, 14 (02) : 119 - 136
  • [23] ELECTRICAL CHARACTERIZATION OF INTEGRATED-CIRCUITS BY SCANNING FORCE MICROSCOPY
    BOHM, C
    ROTHS, C
    MULLER, U
    BEYER, A
    KUBALEK, E
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1994, 24 (1-3): : 218 - 222
  • [24] PROGRESS OF OPTICAL FIBERS AND OPTICAL INTEGRATED-CIRCUITS IN JAPAN
    UCHIDA, T
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 1973, QE 9 (06) : 639 - 639
  • [25] HOLOGRAPHIC GRATINGS FOR INTEGRATED OPTICAL CIRCUITS
    SHEN, R
    RIGHINI, GC
    BELLI, G
    BOFFI, P
    QUANTUM ELECTRONICS AND PLASMA PHYSICS: 5TH ITALIAN CONFERENCE, 1989, 21 : 431 - 435
  • [26] A METROLOGICAL ELECTRON-MICROSCOPE SYSTEM FOR MICROFEATURES OF VERY LARGE-SCALE INTEGRATED-CIRCUITS
    HATSUZAWA, T
    TOYODA, K
    TANIMURA, Y
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (03): : 975 - 979
  • [27] ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS
    REHME, H
    PHYSICS IN TECHNOLOGY, 1979, 10 (03): : 97 - 103
  • [28] ELECTRON-BEAM PROBING OF INTEGRATED-CIRCUITS
    MENZEL, E
    BUCHANAN, R
    SOLID STATE TECHNOLOGY, 1985, 28 (12) : 63 - 70
  • [29] USING THE DEFOCUS IN OPTICAL INSPECTION OF INTEGRATED-CIRCUITS
    BINEFA, X
    SANCHEZ, J
    PEREZ, FX
    ROCA, X
    VITRIA, J
    VILLANUEVA, JJ
    DEFECT RECOGNITION AND IMAGE PROCESSING IN SEMICONDUCTORS AND DEVICES, 1994, (135): : 389 - 392
  • [30] OPTICAL MEASURING METHODS IN THE FABRICATION OF INTEGRATED-CIRCUITS
    BECKMANN, E
    TECHNISCHES MESSEN, 1987, 54 (12): : 464 - 469
12345