ELECTRICAL CHARACTERIZATION OF INTEGRATED-CIRCUITS BY SCANNING FORCE MICROSCOPY

被引：8
|
作者：
BOHM, C [1 ]
ROTHS, C [1 ]
MULLER, U [1 ]
BEYER, A [1 ]
KUBALEK, E [1 ]
机构：
[1] FACHGEBIET ALLGEMEINE & THEORET ELEKTROTECH,D-47048 DUISBURG,GERMANY
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1994年 / 24卷 / 1-3期
关键词：
D O I：
10.1016/0921-5107(94)90331-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new contactless device internal test technique based on a scanning force microscope is presented, enabling electrical characterization of integrated circuits (ICs) with both high spatial and temporal resolution. For the first time a comparison of experimental results obtained with the scanning force microscopy test system and network analyser by characterizing the same IC is shown up to 20 GHz. A new electrical tip-sample interaction model is introduced, enabling calculations of the achievable spatial resolution by this test technique.
引用
收藏
页码：218 / 222
页数：5
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