ELECTRICAL CHARACTERIZATION OF INTEGRATED-CIRCUITS BY SCANNING FORCE MICROSCOPY

被引：8

作者：

BOHM, C ^{[1
]}

ROTHS, C ^{[1
]}

MULLER, U ^{[1
]}

BEYER, A ^{[1
]}

KUBALEK, E ^{[1
]}

机构：

[1] FACHGEBIET ALLGEMEINE & THEORET ELEKTROTECH,D-47048 DUISBURG,GERMANY

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1994年 / 24卷 / 1-3期

关键词：

D O I：

10.1016/0921-5107(94)90331-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new contactless device internal test technique based on a scanning force microscope is presented, enabling electrical characterization of integrated circuits (ICs) with both high spatial and temporal resolution. For the first time a comparison of experimental results obtained with the scanning force microscopy test system and network analyser by characterizing the same IC is shown up to 20 GHz. A new electrical tip-sample interaction model is introduced, enabling calculations of the achievable spatial resolution by this test technique.

引用

页码：218 / 222

页数：5

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