MOISTURE DIFFUSION IN POLYIMIDE FILMS IN INTEGRATED-CIRCUITS

被引：118
|
作者：
DENTON, DD
DAY, DR
PRIORE, DF
SENTURIA, SD
ANOLICK, ES
SCHEIDER, D
机构：
[1] MIT,CTR MAT SCI & ENGN,CAMBRIDGE,MA 02139
[2] IBM CORP,PROD ASSURANCE,FISHKILL,NY 12524
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1985年 / 14卷 / 02期
关键词：
D O I：
10.1007/BF02656671
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：119 / 136
页数：18
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