MOISTURE DIFFUSION IN POLYIMIDE FILMS IN INTEGRATED CIRCUITS.

被引：0

作者：

Denton, D.D. ^{[1
]}

Day, D.R. ^{[1
]}

Priore, D.F. ^{[1
]}

Senturia, S.D. ^{[1
]}

Anolick, E.S. ^{[1
]}

Scheider, D. ^{[1
]}

机构：

[1] MIT, Dep of Electrical Engineering, & Computer Science, Cambridge,, MA, USA, MIT, Dep of Electrical Engineering & Computer Science, Cambridge, MA, USA

来源：

Journal of Electronic Materials | 1985年 / 14卷 / 02期

关键词：

ALUMINUM-PI-ALUMINUM CAPACITORS - DIFFUSION CONSTANT - MOISTURE DIFFUSION - POLYIMIDE FILMS;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：119 / 136

共 50 条

[1] MOISTURE DIFFUSION IN POLYIMIDE FILMS IN INTEGRATED-CIRCUITS
DENTON, DD
DAY, DR
PRIORE, DF
SENTURIA, SD
ANOLICK, ES
SCHEIDER, D
JOURNAL OF ELECTRONIC MATERIALS, 1985, 14 (02) : 119 - 136
[2] Stable Contact Structures with Diffusion Barriers for Integrated Circuits.
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[10] TECHNOLOGY OF MICROWAVE INTEGRATED CIRCUITS.
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