SCANNING-ELECTRON-MICROSCOPE-WRITTEN GRATINGS IN CHALCOGENIDE FILMS FOR OPTICAL INTEGRATED-CIRCUITS

被引：22

|

作者：

HANDA, Y

SUHARA, T

NISHIHARA, H

KOYAMA, J

机构：

来源：

APPLIED OPTICS | 1979年 / 18卷 / 02期

关键词：

D O I：

10.1364/AO.18.000248

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：248 / 252

页数：5

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