Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases

被引：5
|
作者：
Kalyuzhnaya, AG [1 ]
Ryabtsev, AV [1 ]
Shchedrin, AI [1 ]
机构：
[1] Natl Acad Sci Ukraine, Inst Phys, Pr Nauki 46, UA-03028 Kiev, Ukraine
来源：
TECHNICAL PHYSICS | 2003年 / 48卷 / 01期
关键词：
D O I：
10.1134/1.1538724
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The electron energy distribution function (EEDF) in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases is investigated. It is shown that small admixtures of SF6 or CCl4 to nitrogen significantly increase the number of electrons in the energy range 2-6 eV, which corresponds to the inverse part of the EEDF. In nitrogen with small admixtures of F-2 or NF3, the EEDF differ slightly from that calculated for pure nitrogen. The EEDF in these mixtures substantially depends on electron attachment to electronegative gas molecules. (C) 2003 MAIK "Nauka/Interperiodica".
引用
收藏
页码：38 / 42
页数：5
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