Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases

The electron energy distribution function (EEDF) in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases is investigated. It is shown that small admixtures of SF6 or CCl4 to nitrogen significantly increase the number of electrons in the energy range 2-6 eV, which corresponds to the inverse part of the EEDF. In nitrogen with small admixtures of F-2 or NF3, the EEDF differ slightly from that calculated for pure nitrogen. The EEDF in these mixtures substantially depends on electron attachment to electronegative gas molecules. (C) 2003 MAIK "Nauka/Interperiodica".