Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases

被引：5
|
作者：
Kalyuzhnaya, AG [1 ]
Ryabtsev, AV [1 ]
Shchedrin, AI [1 ]
机构：
[1] Natl Acad Sci Ukraine, Inst Phys, Pr Nauki 46, UA-03028 Kiev, Ukraine
来源：
TECHNICAL PHYSICS | 2003年 / 48卷 / 01期
关键词：
D O I：
10.1134/1.1538724
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The electron energy distribution function (EEDF) in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases is investigated. It is shown that small admixtures of SF6 or CCl4 to nitrogen significantly increase the number of electrons in the energy range 2-6 eV, which corresponds to the inverse part of the EEDF. In nitrogen with small admixtures of F-2 or NF3, the EEDF differ slightly from that calculated for pure nitrogen. The EEDF in these mixtures substantially depends on electron attachment to electronegative gas molecules. (C) 2003 MAIK "Nauka/Interperiodica".
引用
收藏
页码：38 / 42
页数：5
相关论文
共 50 条
  • [31] AXIAL EVOLUTION OF THE NEGATIVE GLOW IN A HOLLOW-CATHODE DISCHARGE
    BARTLOW, RB
    GRIFFIN, ST
    WILLIAMS, JC
    ANALYTICAL CHEMISTRY, 1992, 64 (22) : 2751 - 2757
  • [32] SPECIAL FEATURE OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION OF A LAB6 HOLLOW-CATHODE IN THE GLOW ARC TRANSITION
    TONEGAWA, A
    TAKAYAMA, K
    PHYSICS LETTERS A, 1990, 144 (03) : 179 - 182
  • [33] STATE OF EQUILIBRIUM IN A HOLLOW-CATHODE GLOW-DISCHARGE
    TEIXEIRA, MR
    RODRIGUES, FC
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1979, 12 (12) : 2173 - 2180
  • [34] ELECTRON EMISSION FROM CATHODE IN A HOLLOW-CATHODE DISCHARGE
    BORODIN, VS
    GOFMEISTER, VP
    KAGAN, YM
    KOVOLLIK, G
    SOVIET PHYSICS TECHNICAL PHYSICS-USSR, 1969, 13 (10): : 1462 - +
  • [35] Current Distribution Over the Hollow-Cathode Surface for a Low-Pressure Glow Discharge
    Landl, N., V
    Korolev, Y. D.
    Frants, O. B.
    Geyman, V. G.
    Argunov, G. A.
    Nekhoroshev, V. O.
    RUSSIAN PHYSICS JOURNAL, 2021, 64 (07) : 1175 - 1182
  • [36] Current Distribution Over the Hollow-Cathode Surface for a Low-Pressure Glow Discharge
    N. V. Landl
    Y. D. Korolev
    O. B. Frants
    V. G. Geyman
    G. A. Argunov
    V. O. Nekhoroshev
    Russian Physics Journal, 2021, 64 : 1175 - 1182
  • [37] The effect of the anode dimensions on the characteristics of a hollow-cathode glow discharge
    S. P. Nikulin
    Technical Physics, 1997, 42 : 495 - 498
  • [38] Hollow-cathode glow discharge in a trigger unit of pseudospark switch
    Korolev, Y. D.
    Landl, N. V.
    Geyman, V. G.
    Frants, O. B.
    Argunov, G. A.
    PHYSICS OF PLASMAS, 2018, 25 (11)
  • [39] Auxiliary glow discharge in the trigger unit of a hollow-cathode thyratron
    Korolev, Yu. D.
    Landl, N. V.
    Geyman, V. G.
    Frants, O. B.
    Shemyakin, I. A.
    Nekhoroshev, V. O.
    PLASMA PHYSICS REPORTS, 2016, 42 (08) : 799 - 807
  • [40] A Hollow-Cathode Ion Source in Glow Discharge Mass Spectrometry
    Froehlich , G.
    JOURNAL OF ANALYTICAL CHEMISTRY, 2021, 76 (01) : 112 - 128
12345