Characterization of a molybdenum oxide sputtered thin film as a gas sensor

被引：106
|
作者：
Ferroni, M
Guidi, V
Martinelli, G
Nelli, P
Sacerdoti, M
Sberveglieri, G
机构：
[1] Univ Ferrara, Dipartimento Fis, I-44100 Ferrara, Italy
[2] Univ Ferrara, INFM, I-44100 Ferrara, Italy
[3] Univ Ferrara, Ist Mineral, I-44100 Ferrara, Italy
[4] Univ Brescia, Dipartimento Chim & Fis Mat, I-25133 Brescia, Italy
[5] Univ Brescia, INFM, I-25133 Brescia, Italy
来源：
THIN SOLID FILMS | 1997年 / 307卷 / 1-2期
关键词：
gas-sensor; molybdenum; thin film; sputtering;
D O I：
10.1016/S0040-6090(97)00279-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report about preparation and characterization of sputtered MoO3 thin film as sensing layer for gas detection, We show its capability to detect CO concentrations lower than 10 ppm in wet air, a feature that allows direct usage of this material for environmental monitoring. The research also highlights some criteria for selecting a suitable material and shows which features are important for a thin film to be a good candidate as a chemical sensor. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：148 / 151
页数：4
相关论文
共 50 条
  • [41] Gas sensor based on sputtered NiO thin films
    Predanocy, M.
    Hotovy, I.
    Rehacek, V.
    2016 11TH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES & MICROSYSTEMS (ASDAM), 2016, : 121 - 124
  • [42] Characterization of nanostructured titania thin film and its application in gas sensor
    Tang, Guanrong
    Chen, Jing
    MICRO MANUFACTURING TECHNIQUES AND APPLICATIONS, 2013, 289 : 45 - +
  • [43] Sputtered molybdenum oxide thin films for NH3 detection
    Technical Univ of Berlin, Berlin, Germany
    Sensors and Actuators, B: Chemical, 1996, B36 (1 -3 pt 2): : 320 - 324
  • [44] Sputtered molybdenum oxide thin films for NH3 detection
    Mutschall, D
    Holzner, K
    Obermeier, E
    SENSORS AND ACTUATORS B-CHEMICAL, 1996, 36 (1-3) : 320 - 324
  • [45] Deposition and characterisation of sputtered molybdenum oxide thin films with hydrogen atmosphere
    Lopez-Pinto, Nicolau
    Tom, Thomas
    Bertomeu, Joan
    Asensi, Jose Miguel
    Ros, Eloi
    Ortega, Pablo
    Voz, Cristobal
    APPLIED SURFACE SCIENCE, 2021, 563
  • [46] Properties of gallium oxide thin film sputtered from powder target for high temperature oxygen sensor
    Ogita, M
    Kobayashi, K
    Yamada, Y
    Nakanishi, Y
    Hatanaka, Y
    IECON'01: 27TH ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, VOLS 1-3, 2001, : 137 - 140
  • [47] Nano and micro stripe based metal oxide thin film gas sensor
    Palzer, Stefan
    Moretton, Emmanuel
    Ramirez, Francisco Hernandez
    Romano-Rodriguez, Albert
    Morante, Juan Ramon
    Woellenstein, Juergen
    SMART SENSORS, ACTUATORS, AND MEMS III, 2007, 6589
  • [48] On an indium-tin-oxide thin film based ammonia gas sensor
    Lin, Cheng-Wei
    Chen, Huey-Ing
    Chen, Tai-You
    Huang, Chien-Chang
    Hsu, Chi-Shiang
    Liu, Rong-Chau
    Liu, Wen-Chau
    SENSORS AND ACTUATORS B-CHEMICAL, 2011, 160 (01) : 1481 - 1484
  • [49] Indium oxide thin film based ammonia gas and ethanol vapour sensor
    Makhija, KK
    Ray, A
    Patel, RM
    Trivedi, UB
    Kapse, HN
    BULLETIN OF MATERIALS SCIENCE, 2005, 28 (01) : 9 - 17
  • [50] Indium oxide thin film based ammonia gas and ethanol vapour sensor
    K. K. Makhija
    Arabinda Ray
    R. M. Patel
    U. B. Trivedi
    H. N. Kapse
    Bulletin of Materials Science, 2005, 28 : 9 - 17
12345