Characterization of a molybdenum oxide sputtered thin film as a gas sensor

被引：106
|
作者：
Ferroni, M
Guidi, V
Martinelli, G
Nelli, P
Sacerdoti, M
Sberveglieri, G
机构：
[1] Univ Ferrara, Dipartimento Fis, I-44100 Ferrara, Italy
[2] Univ Ferrara, INFM, I-44100 Ferrara, Italy
[3] Univ Ferrara, Ist Mineral, I-44100 Ferrara, Italy
[4] Univ Brescia, Dipartimento Chim & Fis Mat, I-25133 Brescia, Italy
[5] Univ Brescia, INFM, I-25133 Brescia, Italy
来源：
THIN SOLID FILMS | 1997年 / 307卷 / 1-2期
关键词：
gas-sensor; molybdenum; thin film; sputtering;
D O I：
10.1016/S0040-6090(97)00279-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report about preparation and characterization of sputtered MoO3 thin film as sensing layer for gas detection, We show its capability to detect CO concentrations lower than 10 ppm in wet air, a feature that allows direct usage of this material for environmental monitoring. The research also highlights some criteria for selecting a suitable material and shows which features are important for a thin film to be a good candidate as a chemical sensor. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：148 / 151
页数：4
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