Characterization of a molybdenum oxide sputtered thin film as a gas sensor

被引：106
|
作者：
Ferroni, M
Guidi, V
Martinelli, G
Nelli, P
Sacerdoti, M
Sberveglieri, G
机构：
[1] Univ Ferrara, Dipartimento Fis, I-44100 Ferrara, Italy
[2] Univ Ferrara, INFM, I-44100 Ferrara, Italy
[3] Univ Ferrara, Ist Mineral, I-44100 Ferrara, Italy
[4] Univ Brescia, Dipartimento Chim & Fis Mat, I-25133 Brescia, Italy
[5] Univ Brescia, INFM, I-25133 Brescia, Italy
来源：
THIN SOLID FILMS | 1997年 / 307卷 / 1-2期
关键词：
gas-sensor; molybdenum; thin film; sputtering;
D O I：
10.1016/S0040-6090(97)00279-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report about preparation and characterization of sputtered MoO3 thin film as sensing layer for gas detection, We show its capability to detect CO concentrations lower than 10 ppm in wet air, a feature that allows direct usage of this material for environmental monitoring. The research also highlights some criteria for selecting a suitable material and shows which features are important for a thin film to be a good candidate as a chemical sensor. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：148 / 151
页数：4
相关论文
共 50 条
  • [31] THIN TIN-OXIDE FILM ALCOHOL-GAS SENSOR
    PROMSONG, L
    SRIYUDTHSAK, M
    SENSORS AND ACTUATORS B-CHEMICAL, 1995, 25 (1-3) : 504 - 506
  • [32] SENSITIVITY AND SELECTIVITY OF A THIN-FILM TIN OXIDE GAS SENSOR
    DEANGELIS, L
    MINNAJA, N
    SENSORS AND ACTUATORS B-CHEMICAL, 1991, 3 (03) : 197 - 204
  • [33] The Synthetization of the Tungsten Oxide Thin Film Used for Gas Sensor Applications
    Osiac, M.
    Cioatera, N.
    Udristioiu, M. T.
    TIM18 PHYSICS CONFERENCE, 2019, 2071
  • [34] Optical characterization of RF sputtered copper oxide for thin film solar cell applications
    Sinthamani, S.
    Ranjithkumar, M.
    Bharatan, Sudhakar K.
    Anitha, S.
    Sudharsanam, S.
    Sasikala, M.
    MATERIALS TODAY-PROCEEDINGS, 2022, 59 : 814 - 818
  • [35] Optimization and characterization of RF sputtered piezoelectric zinc oxide thin film for transducer applications
    Hsu, Yu-Hsiang
    Lin, John
    Tang, William C.
    2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, : 2393 - 2396
  • [36] WORKING GAS-PRESSURE AND FLOW EFFECTS ON REACTIVELY SPUTTERED MOLYBDENUM OXIDE THIN-FILMS
    JANKOWSKI, AF
    SCHRAWYER, LR
    SURFACE & COATINGS TECHNOLOGY, 1992, 54 (1-3): : 349 - 354
  • [37] Comparison between RF and DC magnetron reactive sputtered molybdenum oxide thin films for gas sensors
    Boyadzhiev, S.
    Lazarova, V.
    Rassovska, M.
    Yordanova, I.
    Yordanov, R.
    OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2010, 4 (10): : 1485 - 1488
  • [38] Humidity-driven degradation of sputtered molybdenum oxide and molybdenum-titanium-oxide thin films
    Goetz, Selina
    Edinger, Stefan
    Linke, Christian
    Franzke, Enrico
    Winkler, Jorg
    Valtiner, Markus
    Dimopoulos, Theodoros
    JOURNAL OF MATERIALS CHEMISTRY C, 2023, 11 (14) : 4899 - 4906
  • [39] Characterization of reactive sputtered TiO2 thin films for gas sensor applications
    Boyadzhiev, Stefan
    Georgieva, Velichka
    Rassovska, Milka
    16 ISCMP: PROGRESS IN SOLID STATE AND MOLECULAR ELECTRONICS, IONICS AND PHOTONICS, 2010, 253
  • [40] SPUTTERED MOLYBDENUM FILM RESISTORS
    SINGH, A
    INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1980, 18 (12) : 1014 - 1015
12345