Sputtered molybdenum oxide thin films for NH3 detection

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Technical Univ of Berlin, Berlin, Germany [1 ]
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Sensors and Actuators, B: Chemical | 1996年 / B36卷 / 1 -3 pt 2期
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This work was supported by the Federal Ministry of Education; Science; Research and Technology (BMBF). The XRD measurements were made by the Institut Fresenius; Dresden;
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页码：320 / 324
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