Integrated sample injection chip for Micro-HPLC

被引：0
|
作者：
Ezaki, Takahiro [1 ,2 ]
Yamazaki, Takeo [2 ]
Yasuda, Susumu [2 ]
Yagi, Takayuki [2 ]
机构：
[1] Canon Inc, Ohta Ku, 30-2 Shimomaruko 3 Chome, Tokyo 1468501, Japan
[2] CANON Inc, Canon Res Ctr, NEMS Platform Res Div, Tokyo, Japan
来源：
2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2006年
关键词：
sample injection; microvalve; passive valve; low pass valve; HPLC;
D O I：
10.1109/NEMS.2006.334578
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we present a novel sample injection chip. Microvalves and microchannels are integrated on the chip. The valve is a passive lowpass valve that allows a liquid flow at a low flow rate and prohibits it when the flow rate exceeds a threshold. We can control the injection volume by changing the channel design. The chip consists of a channel substrate, an upper valve substrate and an under valve substrate. These substrates are separately fabricated and bonded by using MEMS techniques. The chip, not to leak at a pressure difference of 5.0MPa, was successfully applied to high performance liquid chromatography (HPLC). A specific volume of sample (100 nl) was injected to the HPLC column. The results show that the sample injection chip has the possibility of being used in the micro-HPLC systems.
引用
收藏
页码：979 / +
页数：2
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