Novel 600-V trench high-conductivity IGBT (trench HiGT) with short-circuit capability

被引:32
|
作者
Oyama, K [1 ]
Kohno, Y [1 ]
Sakano, J [1 ]
Uruno, J [1 ]
Ishizaka, K [1 ]
Kawase, D [1 ]
Mori, M [1 ]
机构
[1] Hitachi Ltd, Hitachi Res Lab, Hitachi, Ibaraki 3191292, Japan
关键词
D O I
10.1109/ISPSD.2001.934642
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes new 600-V trench high-conductivity IGBTs (trench HiGTs) that have lower on-state voltages of 1.42 and 1.55 V at 200 A/cm(2) and tough short-circuit capabilities of 5 and 10 mus, respectively. These HiGT have a better trade-off between turn-off losses and on-state voltages than conventional trench IGBTs, even better than planar IGBTs. They also offer a lower reverse transfer capacitances (-50%) than the planar IGBT. The input capacitance obtained were lower (-30% to -60%) than that of a conventional trench IGBT.
引用
收藏
页码:417 / 420
页数:4
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