Analysis and design of pressure sensors for micromechanical integrated pressure sensors

被引：1
|
作者：
Kalinkina, M. E. [1 ]
Kozlov, A. S. [1 ]
Labkovskaia, R. Y. [1 ]
Pirozhnikova, O. I. [1 ]
Tkalich, V. L. [1 ]
机构：
[1] ITMO Univ, Fac Informat Technol Secur, St Petersburg, Russia
来源：
IX INTERNATIONAL MULTIDISCIPLINARY SCIENTIFIC AND RESEARCH CONFERENCE MODERN ISSUES IN SCIENCE AND TECHNOLOGY / WORKSHOP ADVANCED TECHNOLOGIES IN AEROSPACE, MECHANICAL AND AUTOMATION ENGINEERING | 2018年 / 450卷
关键词：
D O I：
10.1088/1757-899X/450/3/032004
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Accelerometers, pressure sensors and gyros have good prospects for the future among the wide range of micromechanical instruments that are developing most dynamically. The paper describes the modified version of the design of the pressure sensitive element created by the author with improved metrological characteristics and increased accuracy rates.
引用
收藏
页数：4
相关论文
共 50 条
  • [21] Design of metamaterial based sensors for pressure measurement
    Aylo, Rola
    Banerjee, Partha P.
    Ghosh, Anjan K.
    Verma, Pramode
    INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XIV, 2010, 7604
  • [22] MEMS Pressure Sensors Design by the COMSOL System
    Lobur, M.
    Vivchar, D.
    Jaworski, N.
    2016 13TH INTERNATIONAL CONFERENCE ON MODERN PROBLEMS OF RADIO ENGINEERING, TELECOMMUNICATIONS AND COMPUTER SCIENCE (TCSET), 2016, : 156 - 158
  • [23] Design of Capsule Pressure Sensors Thermal Compensation
    Vlach, R.
    Kadlec, J.
    RECENT ADVANCES IN MECHATRONICS: 2008-2009, 2009, : 103 - +
  • [24] Design of temperature compensation system of pressure sensors
    Chen, Guiyou
    Sun, Tongjing
    Wang, Pitao
    Sun, Bo
    2006 IEEE INTERNATIONAL CONFERENCE ON INFORMATION ACQUISITION, VOLS 1 AND 2, CONFERENCE PROCEEDINGS, 2006, : 1042 - 1046
  • [25] EFFECT OF METASTRUCTURE DESIGN ON THE PERFORMANCE OF PRESSURE SENSORS
    Zhao, Huan
    Huddy, Julia E.
    Scheideler, William J.
    Li, Yan
    PROCEEDINGS OF ASME 2022 INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, IMECE2022, VOL 3, 2022,
  • [26] BRAIDED HIGH PRESSURE VESSELS WITH INTEGRATED OPTICAL SENSORS
    Hufenbach, Werner
    Czulak, Andrzej
    Blazejewski, Wojciech
    Gasior, Pawel
    COMPOSITES THEORY AND PRACTICE, 2009, 9 (02): : 107 - 111
  • [27] RESISTIVE PRESSURE SENSORS INTEGRATED WITH A CORIOLIS MASS FLOWSENSOR
    Alveringh, D.
    Schut, T. V. P.
    Wiegerink, R. J.
    Sparreboom, W.
    Lotters, J. C.
    2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 1167 - 1170
  • [28] Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors
    Riedel, Ralf
    Toma, Liviu
    Janssen, Enrico
    Nuffer, Juergen
    Melz, Tobias
    Hanselka, Holger
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2010, 93 (04) : 920 - 924
  • [29] INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS
    FAN, LS
    TAI, YC
    MULLER, RS
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 724 - 730
  • [30] Integrated Optical Pressure Sensors in Silicon-on-Insulator
    Hallynck, E.
    Bienstman, P.
    IEEE PHOTONICS JOURNAL, 2012, 4 (02): : 443 - 450
12345