Analysis and design of pressure sensors for micromechanical integrated pressure sensors

被引：1
|
作者：
Kalinkina, M. E. [1 ]
Kozlov, A. S. [1 ]
Labkovskaia, R. Y. [1 ]
Pirozhnikova, O. I. [1 ]
Tkalich, V. L. [1 ]
机构：
[1] ITMO Univ, Fac Informat Technol Secur, St Petersburg, Russia
来源：
IX INTERNATIONAL MULTIDISCIPLINARY SCIENTIFIC AND RESEARCH CONFERENCE MODERN ISSUES IN SCIENCE AND TECHNOLOGY / WORKSHOP ADVANCED TECHNOLOGIES IN AEROSPACE, MECHANICAL AND AUTOMATION ENGINEERING | 2018年 / 450卷
关键词：
D O I：
10.1088/1757-899X/450/3/032004
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Accelerometers, pressure sensors and gyros have good prospects for the future among the wide range of micromechanical instruments that are developing most dynamically. The paper describes the modified version of the design of the pressure sensitive element created by the author with improved metrological characteristics and increased accuracy rates.
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页数：4
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