Analysis and design of pressure sensors for micromechanical integrated pressure sensors

被引：1
|
作者：
Kalinkina, M. E. [1 ]
Kozlov, A. S. [1 ]
Labkovskaia, R. Y. [1 ]
Pirozhnikova, O. I. [1 ]
Tkalich, V. L. [1 ]
机构：
[1] ITMO Univ, Fac Informat Technol Secur, St Petersburg, Russia
来源：
IX INTERNATIONAL MULTIDISCIPLINARY SCIENTIFIC AND RESEARCH CONFERENCE MODERN ISSUES IN SCIENCE AND TECHNOLOGY / WORKSHOP ADVANCED TECHNOLOGIES IN AEROSPACE, MECHANICAL AND AUTOMATION ENGINEERING | 2018年 / 450卷
关键词：
D O I：
10.1088/1757-899X/450/3/032004
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Accelerometers, pressure sensors and gyros have good prospects for the future among the wide range of micromechanical instruments that are developing most dynamically. The paper describes the modified version of the design of the pressure sensitive element created by the author with improved metrological characteristics and increased accuracy rates.
引用
收藏
页数：4
相关论文
共 50 条
  • [31] Integrated Fibrous Iontronic Pressure Sensors with High Sensitivity and Reliability for Human Plantar Pressure and Gait Analysis
    Li, Wendong
    Zou, Kangkang
    Guo, Junwei
    Zhang, Cancan
    Feng, Jiabao
    You, Jia
    Cheng, Gang
    Zhou, Qinghua
    Kong, Miqiu
    Li, Guangxian
    Guo, Chuan Fei
    Yang, Junlong
    ACS NANO, 2024, 18 (22) : 14672 - 14684
  • [32] Flexible Integrated Air Pressure Sensors for Monitoring Positive and Negative Pressure Distribution
    Xuan, Yan
    Uchiyama, Takahiro
    Ura, Hiroki
    Hagiwara, Shuji
    Kato, Hiroyuki
    Sarkar, Sudipta Kumar
    Takei, Kuniharu
    ACS APPLIED MATERIALS & INTERFACES, 2024, 16 (40) : 54215 - 54223
  • [33] Simulation and Design of Micro Pressure Sensors Applied to Measure the Intracranial Pressure
    Pang Bo
    Zhang Zhao-Hua
    Ren Tian-Ling
    2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013), 2013, : 120 - 123
  • [34] Compliance Compensation Analysis of Micromechanical Testers Integrated With Acoustic Emission Sensors
    Yeo, Alfred
    Yong, Eric
    Zhou, Kun
    IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2014, 14 (03) : 898 - 903
  • [35] Analysis of the possibility of a PGA309 integrated circuit application in pressure sensors
    Walendziuk, Wojciech
    Baczewski, Michal
    Idzkowski, Adam
    PHOTONICS APPLICATIONS IN ASTRONOMY, COMMUNICATIONS, INDUSTRY, AND HIGH-ENERGY PHYSICS EXPERIMENTS 2016, 2016, 10031
  • [36] Design Approach and Realization of Integrated Silicon Piezoresistive Pressure Sensors for Wide Application Ranges
    Schreiber-Prillwitz, W.
    Saukoski, M.
    Chmiel, G.
    Job, R.
    CHEMICAL SENSORS 9 -AND- MEMS/NEMS 9, 2010, 33 (08): : 327 - 335
  • [37] MICROMECHANICAL SENSORS
    BENECKE, W
    VLSI AND COMPUTER PERIPHERALS: VLSI AND MICROELECTRONIC APPLICATIONS IN INTELLIGENT PERIPHERALS AND THEIR INTERCONNECTION NETWORKS, 1989, : C39 - C47
  • [38] PRESSURE SENSORS AND TRANSDUCERS
    ORMOND, T
    EDN, 1988, 33 (16) : 107 - &
  • [39] MEMS pressure sensors
    VTI Technologies, Finland
    Electron World, 2007, 1857 (28-30): : 28 - 30
  • [40] PIEZORESISTIVE PRESSURE SENSORS
    MICHAELI, W
    LANGKAMP, U
    SCHAFER, B
    KRAACK, J
    KUNSTSTOFFE-PLAST EUROPE, 1995, 85 (11): : 1912 - 1914
12345