Design of temperature compensation system of pressure sensors

被引：8
|
作者：
Chen, Guiyou [1 ]
Sun, Tongjing [1 ]
Wang, Pitao [1 ]
Sun, Bo [1 ]
机构：
[1] Shandong Univ, Sch Control Sci & Engn, Jinan 250061, Peoples R China
来源：
2006 IEEE INTERNATIONAL CONFERENCE ON INFORMATION ACQUISITION, VOLS 1 AND 2, CONFERENCE PROCEEDINGS | 2006年
关键词：
pressure sensors; temperature compensation MAX1452; cubic B-spline;
D O I：
10.1109/ICIA.2006.305883
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
In order to improve the accuracy of silicon piezoresistance pressure sensor under different temperatures, temperature compensation should be carried out. A temperature compensation system of pressure sensors is presented. The system are structure, hardware and software design of the introduced. In the hardware design, MAX1452 is used as the main compensation unit. A curve fitting algorithm based on cubic B-spline is adopted in the temperature compensation software design. The accuracy and the production efficiency of the sensors are improved. The system features in low cost, high efficiency and high accuracy. And it has great spreading value.
引用
收藏
页码：1042 / 1046
页数：5
相关论文
共 50 条
  • [1] Design and Experimental Research of a Temperature Compensation System for Silicon-on-Sapphire Pressure Sensors
    Guo, Zhanshe
    Lu, Chao
    Wang, Yanshan
    Liu, Defeng
    Huang, Manguo
    Li, Xin
    IEEE SENSORS JOURNAL, 2017, 17 (03) : 709 - 715
  • [2] MINIATURE PRESSURE SENSORS AND THEIR TEMPERATURE COMPENSATION
    KOWALSKI, G
    SENSORS AND ACTUATORS, 1987, 11 (04): : 367 - 376
  • [3] TEMPERATURE COMPENSATION OF PIEZORESISTIVE PRESSURE SENSORS
    AKBAR, M
    SHANBLATT, MA
    SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (03) : 155 - 162
  • [4] DIGITAL TEMPERATURE COMPENSATION OF CAPACITIVE PRESSURE SENSORS
    Mozek, Matej
    Vrtacnik, Danilo
    Resnik, Drago
    Pecar, Borut
    Amon, Slavko
    INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS, 2010, 40 (01): : 38 - 44
  • [5] Design of Capsule Pressure Sensors Thermal Compensation
    Vlach, R.
    Kadlec, J.
    RECENT ADVANCES IN MECHATRONICS: 2008-2009, 2009, : 103 - +
  • [6] Mechanical Structure Design of Pressure Sensors With Temperature Self-Compensation for Invasive Blood Pressure Monitoring
    Zhou, Lianqiao
    Li, Qinlan
    Xu, Xinkai
    Wei, Shuang
    Wang, Shugang
    Cui, Jingqiang
    Wang, Guosheng
    Liu, Chong
    Su, Yewang
    JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 2024, 91 (11):
  • [7] A FULLY INTEGRATED TEMPERATURE COMPENSATION TECHNIQUE FOR PIEZORESISTIVE PRESSURE SENSORS
    AKBAR, M
    SHANBLATT, MA
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1993, 42 (03) : 771 - 775
  • [8] Temperature compensation of pressure-sensitive luminescent polymer sensors
    Sano, Sachiko
    Yuuki, Takahiro
    Hyakutake, Tsuyoshi
    Morita, Katsuaki
    Sakaue, Hirotaka
    Arai, Satoshi
    Matsumoto, Hidetoshi
    Michinobu, Tsuyoshi
    SENSORS AND ACTUATORS B-CHEMICAL, 2018, 255 : 1960 - 1966
  • [9] Temperature compensation study of pressure sensors after leadless packaging
    Wang, Dong
    Liu, Fangting
    Duan, Ji'an
    Li, Junhui
    SENSOR REVIEW, 2025,
  • [10] Research of Temperature Compensation Methods on High Accuracy Pressure Sensors
    Wang, Jilin
    Xia, Shulan
    EQUIPMENT MANUFACTURING TECHNOLOGY AND AUTOMATION, PTS 1-3, 2011, 317-319 : 1084 - 1087
12345