A FULLY INTEGRATED TEMPERATURE COMPENSATION TECHNIQUE FOR PIEZORESISTIVE PRESSURE SENSORS

被引：22
|
作者：
AKBAR, M [1 ]
SHANBLATT, MA [1 ]
机构：
[1] MICHIGAN STATE UNIV,DEPT ELECT ENGN,E LANSING,MI 48824
来源：
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1993年 / 42卷 / 03期
关键词：
D O I：
10.1109/19.231607
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fully integrated temperature compensation technique for piezoresistive pressure sensors is presented. The technique is suitable for batch fabricated sensors operable over a temperature range of -40-degrees-C-130-degrees-C and a pressure range of 0-310 kPa. The implementing hardware for the technique is developed and verified through PSpice and VHDL simulations. The technique is very effective for pressure values below 240 kPa and provides reasonable results for higher pressures. The technique is structurally simple and uses standard IC fabrication technologies.
引用
收藏
页码：771 / 775
页数：5
相关论文
共 50 条
  • [1] TEMPERATURE COMPENSATION OF PIEZORESISTIVE PRESSURE SENSORS
    AKBAR, M
    SHANBLATT, MA
    SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (03) : 155 - 162
  • [2] NOVEL AND LOW-COST TEMPERATURE COMPENSATION TECHNIQUE FOR PIEZORESISTIVE PRESSURE SENSORS
    Reverter, Ferran
    Horak, Goran
    Bilas, Vedran
    Gasulla, Manel
    XIX IMEKO WORLD CONGRESS: FUNDAMENTAL AND APPLIED METROLOGY, PROCEEDINGS, 2009, : 2084 - 2087
  • [3] Double bridge technique for temperature compensation of piezoresistive pressure sensor
    Hsieh, PT
    Chang, YM
    Xu, JM
    Uang, CM
    SMART STRUCTURES AND MATERIALS 2002: SMART STRUCTURES AND INTEGRATED SYSTEMS, 2002, 4701 : 627 - 633
  • [4] Calibration and error compensation of piezoresistive pressure sensors
    Buttner, U
    Nakladal, A
    Peschka, A
    Gerlach, G
    TECHNISCHES MESSEN, 1998, 65 (06): : 236 - 243
  • [5] Temperature Compensation Method for Piezoresistive Pressure Sensors Based on Gated Recurrent Unit
    Liu, Mian
    Wang, Zhiwu
    Jiang, Pingping
    Yan, Guozheng
    SENSORS, 2024, 24 (16)
  • [6] EFFECTS OF PROCESS VARIATIONS IN A CMOS CIRCUIT FOR TEMPERATURE COMPENSATION OF PIEZORESISTIVE PRESSURE SENSORS
    GAKKESTAD, J
    OHLCKERS, P
    HALBO, L
    SENSORS AND ACTUATORS A-PHYSICAL, 1995, 48 (01) : 63 - 71
  • [7] Research on temperature drift mechanism and compensation method of silicon piezoresistive pressure sensors
    Wu, Ruirui
    Li, Huaijiang
    Gao, Lei
    AIP ADVANCES, 2023, 13 (03)
  • [8] Application of aluminum films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors
    Stankevic, V
    Simkevicius, C
    SENSORS AND ACTUATORS A-PHYSICAL, 1998, 71 (03) : 161 - 166
  • [9] Accurate Nonlinearity and Temperature Compensation Method for Piezoresistive Pressure Sensors Based on Data Generation
    Zou, Mingxuan
    Xu, Ye
    Jin, Jianxiang
    Chu, Min
    Huang, Wenjun
    SENSORS, 2023, 23 (13)
  • [10] A Dynamic Temperature Compensation Method for Piezoresistive Pressure Sensors Using Heat Transfer Analysis
    Yuan, Chao
    Wang, Zhaoyang
    Tang, Chengxu
    Huang, Yun
    Li, Qiao
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2025, 74
12345