A FULLY INTEGRATED TEMPERATURE COMPENSATION TECHNIQUE FOR PIEZORESISTIVE PRESSURE SENSORS

被引：22
|
作者：
AKBAR, M [1 ]
SHANBLATT, MA [1 ]
机构：
[1] MICHIGAN STATE UNIV,DEPT ELECT ENGN,E LANSING,MI 48824
来源：
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1993年 / 42卷 / 03期
关键词：
D O I：
10.1109/19.231607
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fully integrated temperature compensation technique for piezoresistive pressure sensors is presented. The technique is suitable for batch fabricated sensors operable over a temperature range of -40-degrees-C-130-degrees-C and a pressure range of 0-310 kPa. The implementing hardware for the technique is developed and verified through PSpice and VHDL simulations. The technique is very effective for pressure values below 240 kPa and provides reasonable results for higher pressures. The technique is structurally simple and uses standard IC fabrication technologies.
引用
收藏
页码：771 / 775
页数：5
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