″INHIBITION EFFECT″ OF A TRICHLOROETHANE OXIDATION TO SUPPRESS THE STACKING-FAULT NUCLEATION IN SILICON.

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Claeys, C.L. [1 ]
Declerck, G.J. [1 ]
Van Overstraeten, R.J. [1 ]
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[1] K.U. Leuven, E.S.A.T. Laboratory, Kardinaal Mercierlaan 94, B-3030 Heverlee, Belgium
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