Finite element method design and analysis of a MEMS comb drive

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作者：
Department of Physics and Electronics, Ovidius University of Constanta, Constanta, Romania [1 ]
机构：
来源：
Proc. Int. Conf. Electron., Comput. Artif. Intell., ECAI | / WF5-WF8期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
7301233
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学科分类号：
摘要：
Electrostatic actuators - Electrostatic force - Finite element method
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