Finite element method design and analysis of a MEMS comb drive

被引：0
|
作者：
Department of Physics and Electronics, Ovidius University of Constanta, Constanta, Romania [1 ]
机构：
来源：
Proc. Int. Conf. Electron., Comput. Artif. Intell., ECAI | / WF5-WF8期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
7301233
中图分类号：
学科分类号：
摘要：
Electrostatic actuators - Electrostatic force - Finite element method
引用
收藏
相关论文
共 50 条
  • [41] Finite element analysis of the thermal characteristics of MEMS switches
    Yan, XM
    McGruer, NE
    Adams, GG
    Majumder, S
    BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 412 - 415
  • [42] Investigating the reliability of electrostatic comb-drive actuators used in microfluidic and space systems using finite element analysis
    Moussa, WA
    Ahmed, H
    Badawy, W
    Moussa, M
    CANADIAN JOURNAL OF ELECTRICAL AND COMPUTER ENGINEERING-REVUE CANADIENNE DE GENIE ELECTRIQUE ET INFORMATIQUE, 2002, 27 (04): : 195 - 200
  • [43] Investigating the reliability of electrostatic comb-drive actuators used in microfluidic and space systems using finite element analysis
    Moussa, Walied A.
    Ahmed, Hesham
    Badawy, Wael
    Moussa, Medhat
    Canadian Journal of Electrical and Computer Engineering, 2002, 27 (04) : 195 - 200
  • [44] Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer
    Li, Ru
    Mohammed, Zakriya
    Rasras, Mahmoud
    Elfadel, Ibrahim M.
    Choi, Daniel
    MEASUREMENT, 2021, 169
  • [45] Design of a Novel MEMS Microgripper with Rotatory Electrostatic Comb-Drive Actuators for Biomedical Applications
    Velosa-Moncada, Luis A.
    Antonio Aguilera-Cortes, Luz
    Gonzalez-Palacios, Max A.
    Raskin, Jean-Pierre
    Herrera-May, Agustin L.
    SENSORS, 2018, 18 (05)
  • [46] A New Analysis on Reduction of Undesired Beam Bending in Electrostatic Comb Drive MEMS Actuator
    Mukherjee, Banibrata
    Swamy, Kenkere Balashanthamurthy Mruthyunjaya
    Sen, Siddhartha
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2020, 69 (02) : 488 - 500
  • [47] Design and analysis of a miniature reciprocating compressor driven by a comb drive
    Hao, Z.
    Kapat, J.S.
    Chow, L.C.
    Sundaram, K.B.
    American Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES, 2000, 40 : 111 - 118
  • [48] Design and analysis of a comb-drive actuator for large displacement
    Ku, C. L.
    Chen, R.
    Chen, Y. C.
    Advances in Electronic Packaging 2005, Pts A-C, 2005, : 1731 - 1735
  • [49] MEMS millimeter-wave filter design based on 3-D finite element method
    Yang, Huai-Zhi
    Sun, Hou-Jun
    Yu, Wei-Hua
    Lu, Xin
    Binggong Xuebao/Acta Armamentarii, 2008, 29 (01): : 37 - 42
  • [50] Coupling analysis of finite element and finite volume method for the design and construction of FPSO crane
    Han, Dae-Suk
    Yoo, Sung-Won
    Yoon, Hyun-Sik
    Kim, Myung-Hyun
    Kim, Sang-Hyun
    Lee, Jae-Myung
    AUTOMATION IN CONSTRUCTION, 2011, 20 (04) : 368 - 379
12345