Finite element method design and analysis of a MEMS comb drive

被引：0
|
作者：
Department of Physics and Electronics, Ovidius University of Constanta, Constanta, Romania [1 ]
机构：
来源：
Proc. Int. Conf. Electron., Comput. Artif. Intell., ECAI | / WF5-WF8期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
7301233
中图分类号：
学科分类号：
摘要：
Electrostatic actuators - Electrostatic force - Finite element method
引用
收藏
相关论文
共 50 条
  • [31] Computation of Capacitance for MEMS Comb-Drive Structures
    李明辉
    高世桥
    刘海鹏
    梁新建
    Journal of Beijing Institute of Technology, 2009, 18 (01) : 1 - 5
  • [32] Ceramic bracket design: An analysis using the finite element method
    Ghosh, J
    Nanda, RS
    Duncanson, MG
    Currier, GF
    AMERICAN JOURNAL OF ORTHODONTICS AND DENTOFACIAL ORTHOPEDICS, 1995, 108 (06) : 575 - 582
  • [33] ANALYSIS OF CAVITY DESIGN, USING THE FINITE-ELEMENT METHOD
    PETERS, MCRB
    POORT, HW
    PLASSCHAERT, AJM
    JOURNAL OF DENTAL RESEARCH, 1980, 59 : 341 - 341
  • [34] Design and analysis of hybrid composite using the finite element method
    Talukdar, Arindam
    Ghosh, Arnab
    Saha, Sanchari
    Roy, Sandipan
    Datta, Shubhabrata
    3RD INTERNATIONAL CONFERENCE ON ADVANCES IN MECHANICAL ENGINEERING (ICAME 2020), PTS 1-6, 2020, 912
  • [35] Design and analysis of electro optic sensor by finite element method
    Laskar, S
    Dutta, PK
    Sen, S
    PROCEEDINGS OF IEEE INTERNATIONAL CONFERENCE ON INDUSTRIAL TECHNOLOGY 2000, VOLS 1 AND 2, 2000, : 12 - 17
  • [36] Analysis and Design of a Flextensional Transducer by Means of the Finite Element Method
    Roh, Yongrae
    Jang, Kookjin
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (05) : 3997 - 4002
  • [37] Design and analysis of chiral and achiral metasurfaces with the finite element method
    Amboli, Jayeeta
    Gallas, Bruno
    Demesy, Guillaume
    Bonod, Nicolas
    OPTICS EXPRESS, 2023, 31 (26) : 43147 - 43162
  • [38] Bifurcation Stenting Design and Analysis Using Finite Element Method
    Suyitno
    Pratama, H. I.
    Pudjilaksono, L.
    DISRUPTIVE INNOVATION IN MECHANICAL ENGINEERING FOR INDUSTRY COMPETITIVENESS, 2018, 1983
  • [39] Fabrication comb-drive device by MEMS and electroplating
    Chien, CH
    Chen, SH
    DTIP 2003: DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS 2003, 2003, : 362 - 366
  • [40] Coupled field analyses in MEMS with finite element analysis
    Sikakollu, RC
    Meekisho, L
    LaRosa, A
    JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 2005, 127 (01): : 34 - 37
12345