A Linearized Temperature Measurement System Based on the B-Mode of SC-Cut Quartz Crystal

被引:0
|
作者
Li, Zhiqi [1 ]
Zhai, Haipeng [1 ]
Miao, Miao [1 ]
Zhou, Wei [1 ]
机构
[1] Xidian Univ, Sch Mechanoelect Engn, Xian 710071, Peoples R China
基金
中国国家自然科学基金;
关键词
B-mode; digitizer; linearization; SC-cut quartz crystal; temperature measurement;
D O I
10.1109/JSEN.2024.3374763
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article demonstrates a linearized temperature measurement system based on the B-mode of SC-cut quartz crystal, which has high precision and good linearity. The proposed system uses a digital linear phase comparison measurement method by selecting a phase detection region, which achieves high resolution and fast response for temperature measurement. Extensive error analysis and performance evaluation of the system were conducted in this study. The developed linearized temperature measurement system demonstrated excellent performance, including a wide temperature measuring range from (-10 C-degrees to 80 C-degrees), providing sufficient resolution and extremely fast response time with a resolution of 0.01 C-degrees at 10 mu s, a resolution of 5E-5 C-degrees at 10 ms, and a resolution of 1E-7 C-degrees at 1 s when the temperature keeps stable. It achieves an extremely low-temperature measurement relative error (R.E. < 0.24%) and nonlinearity (N.L. < 0.18%). The measurement results show that the maximum estimate of the Allan variance is 2.3E-4 C-degrees. The proposed system has wide prospects for intelligent applications and can play a crucial role in scenarios that require high-precision and fast-response temperature measurements.
引用
收藏
页码:12251 / 12258
页数:8
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