VACUUM ULTRAVIOLET RADIATION-DAMAGE OF KCI SURFACE - APPLICATION OF COMBINED SPECTROSCOPIC ELLIPSOMETRY AND REFLECTOMETRY

被引：20
作者：
BERMUDEZ, VM
机构：
来源：
SURFACE SCIENCE | 1978年 / 74卷 / 03期
关键词：
D O I：
10.1016/0039-6028(78)90015-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：568 / 594
页数：27
相关论文
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