EFFECT OF SAMPLE IMPERFECTIONS IN WAVELENGTH-SCANNING POLARIZATION-MODULATION ELLIPSOMETRY

被引:10
作者
BERMUDEZ, VM
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D O I
10.1016/0030-4018(77)90395-9
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
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页码:413 / 418
页数:6
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