EFFECTS OF COMPONENT IMPERFECTIONS ON ELLIPSOMETER CALIBRATION

被引：15

作者：

HUNTER, WR ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1973年 / 63卷 / 08期

关键词：

D O I：

10.1364/JOSA.63.000951

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：951 / 957

页数：7

共 9 条

[1] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&

[2] SPECIMEN COHERENT SCATTERING AND COMPENSATOR DEFECTS IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) :1236-&

[3] GENERAL TREATMENT OF EFFECT OF CELL WINDOWS IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (06) :773-&

[4] EFFECTS OF POLARIZER ELLIPTICITY ON ELLIPSOMETRY MEASUREMENTS [J].

HUNTER, WR ;

EATON, DH ;

SAH, CT .

SURFACE SCIENCE, 1970, 20 (02) :355-&

[5] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+

[6] ANALYSES AND CORRECTIONS OF INSTRUMENTAL ERRORS IN ELLIPSOMETRY [J].

MCCRACKIN, FL .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (01) :57-+

[7]

MCCRACKIN FL, 1969, NBS479 US TECH NOT

[8] DEFINITIONS AND CONVENTIONS IN ELLIPSOMETRY [J].

MULLER, RH .

SURFACE SCIENCE, 1969, 16 :14-&

[9] ELLIPSOMETRY USING A RETARDATION PLATE AS COMPENSATOR [J].

OLDHAM, WG .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (05) :617-&

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