EFFECTS OF POLARIZER ELLIPTICITY ON ELLIPSOMETRY MEASUREMENTS

被引：19

作者：

HUNTER, WR

EATON, DH

SAH, CT

机构：

来源：

SURFACE SCIENCE | 1970年 / 20卷 / 02期

关键词：

D O I：

10.1016/0039-6028(70)90188-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：355 / &

共 10 条

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ARCHER, RJ ;

SHANK, CV .

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[3] FORMULAS FOR USING WAVE PLATES IN ELLIPSOMETRY [J].

HOLMES, DA ;

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[4] ACCURACY OF MEASUREMENT OF ELLIPSOMETRIC PARAMETERS DELTA AND PSI [J].

LUKES, F .

SURFACE SCIENCE, 1969, 16 :74-&

[5] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+

[6] OBSERVATIONS OF DEFECTS IN CROSSED GLAN-THOMPSON POLARIZERS [J].

MOELLER, CE ;

GRIESER, DR .

APPLIED OPTICS, 1969, 8 (01) :206-&

[7] DEFINITIONS AND CONVENTIONS IN ELLIPSOMETRY [J].

MULLER, RH .

SURFACE SCIENCE, 1969, 16 :14-&

[8] ELLIPSOMETRY USING A RETARDATION PLATE AS COMPENSATOR [J].

OLDHAM, WG .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (05) :617-&

[9] A THEORETICAL AND EXPERIMENTAL ANALYSIS OF ELLIPSOMETER [J].

SMITH, PH .

SURFACE SCIENCE, 1969, 16 :34-&

[10]

WINTERBOTTOM AB, 1937, J SCI INSTRUM, V14, P203

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