COMBINED REFLECTION AND TRANSMISSION THIN-FILM ELLIPSOMETRY - UNIFIED LINEAR ANALYSIS

被引：35

作者：

AZZAM, RMA ^{[1
]}

ELSHAZLYZAGHLOUL, M ^{[1
]}

BASHARA, NM ^{[1
]}

机构：

[1] UNIV NEBRASKA,COLL ENGN,ELECT MAT LAB,LINCOLN,NB 68508

来源：

APPLIED OPTICS | 1975年 / 14卷 / 07期

关键词：

D O I：

10.1364/AO.14.001652

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：1652 / 1663

页数：12

共 25 条

[1] OPTICAL MEASUREMENT OF FILM GROWTH ON SILICON AND GERMANIUM SURFACES IN ROOM AIR [J].

ARCHER, RJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1957, 104 (10) :619-622

[2]

Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6

[3] SPECIMEN COHERENT SCATTERING AND COMPENSATOR DEFECTS IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) :1236-&

[4]

BASHARA NM, 1969, P S RECENT DEVELOPME

[5] ELLIPSOMETRY IN SUB-MONOLAYER REGION [J].

BOOTSMA, GA ;

MEYER, F .

SURFACE SCIENCE, 1969, 14 (01) :52-&

[6] EFFECT OF THIN SURFACE FILM ON ELLIPSOMETRIC DETERMINATION OF OPTICAL CONSTANTS [J].

BURGE, DK ;

BENNETT, HE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1964, 54 (12) :1428-&

[7] A HIGH SPEED PRECISION AUTOMATIC ELLIPSOMETER [J].

CAHAN, BD ;

SPANIER, RF .

SURFACE SCIENCE, 1969, 16 :166-&

[8] INTERNAL REFLECTION ELLIPSOMETRY FOR METAL DEPOSITS [J].

CHAN, EC ;

MARTON, JP .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (10) :4027-&

[9]

CONFER DE, TO BE PUBLISHED

[10]

DENENGELSEN D, 1972, J PHYS CHEM, V76, P3390

← 1 2 3 →