CHARACTERIZATION OF LOW-PRESSURE HIGH-FREQUENCY PLASMAS BY DC PROBE MEASUREMENTS

被引：0
|
作者：
FRANZREB, K
FUCHS, A
OECHSNER, H
机构：
来源：
PLASMA SURFACE ENGINEERING, VOLS 1 AND 2 | 1989年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：99 / 105
页数：7
相关论文
共 50 条
  • [41] Modeling of high-pressure, high-frequency (RF) oxygen plasmas
    Or, DT
    Subramanian, NS
    Heberlein, JVR
    Pfender, E
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1997, 25 (05) : 1034 - 1041
  • [42] THE INTERACTION OF HIGH-FREQUENCY AND LOW-FREQUENCY WAVES IN MAGNETIZED PLASMAS
    RELKE, IV
    RUBENCHIK, AM
    JOURNAL OF PLASMA PHYSICS, 1988, 39 : 369 - 384
  • [43] PARTICLE CHARGING IN LOW-PRESSURE PLASMAS
    MATSOUKAS, T
    RUSSELL, M
    JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) : 4285 - 4292
  • [44] Nanodiamonds in dusty low-pressure plasmas
    Vandenbulcke, L.
    Gries, T.
    Rouzaud, J. N.
    APPLIED PHYSICS LETTERS, 2009, 94 (04)
  • [45] HETEROGENEOUS CATALYSIS IN LOW-PRESSURE PLASMAS
    GICQUEL, A
    CAVADIAS, S
    AMOUROUX, J
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1986, 19 (11) : 2013 - 2042
  • [46] Sterilisation with low-pressure microwave plasmas
    Feichtinger, J
    Schulz, A
    Walker, M
    Schumacher, U
    SURFACE & COATINGS TECHNOLOGY, 2003, 174 : 564 - 569
  • [47] "Anomalous" collisionality in low-pressure plasmas
    Lafleur, T.
    Chabert, P.
    Turner, M. M.
    Booth, J. P.
    PHYSICS OF PLASMAS, 2013, 20 (12)
  • [48] OPTICAL DIAGNOSTICS OF LOW-PRESSURE PLASMAS
    DREYFUS, RW
    JASINSKI, JM
    WALKUP, RE
    SELWYN, GS
    PURE AND APPLIED CHEMISTRY, 1985, 57 (09) : 1265 - 1276
  • [49] Fluid modeling of electron heating in low-pressure, high-frequency capacitively coupled plasma discharges
    Chen, GY
    Raja, LL
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (11) : 6073 - 6081
  • [50] ELECTRIC-FIELD REVERSAL AND AMPLIFICATION IN A LOW-PRESSURE HIGH-FREQUENCY GAS-DISCHARGE
    HARMON, GS
    AMERICAN JOURNAL OF PHYSICS, 1976, 44 (09) : 869 - 871
12345