"Anomalous" collisionality in low-pressure plasmas

被引:18
|
作者
Lafleur, T. [1 ]
Chabert, P. [1 ]
Turner, M. M. [2 ,3 ]
Booth, J. P. [1 ]
机构
[1] Ecole Polytech, LPP CNRS, F-91128 Palaiseau, France
[2] Dublin City Univ, Sch Phys Sci, Dublin 9, Ireland
[3] Dublin City Univ, Natl Ctr Plasma Sci & Technol, Dublin 9, Ireland
关键词
PARTICLE-IN-CELL; ELECTRON-ENERGY; RF DISCHARGE; COEFFICIENTS; TRANSITION; TRANSPORT; GASES;
D O I
10.1063/1.4859155
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Based on a theoretical argument from fundamental kinetic theory, by way of simple worked examples, and through the use of particle-in-cell simulations of capacitively coupled plasmas, we demonstrate that conventional methods for calculating the momentum transfer collision frequency in low-pressure plasmas can be seriously erroneous. This potentially plays an important and previously unconsidered role in many low-pressure discharges, and at least in part provides a possible explanation for anomalous behaviour often encountered in these plasmas. (C) 2013 AIP Publishing LLC.
引用
收藏
页数:4
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