"Anomalous" collisionality in low-pressure plasmas

被引：18

作者：

Lafleur, T. ^{[1
]}

Chabert, P. ^{[1
]}

Turner, M. M. ^{[2
,3
]}

Booth, J. P. ^{[1
]}

机构：

[1] Ecole Polytech, LPP CNRS, F-91128 Palaiseau, France

[2] Dublin City Univ, Sch Phys Sci, Dublin 9, Ireland

[3] Dublin City Univ, Natl Ctr Plasma Sci & Technol, Dublin 9, Ireland

来源：

PHYSICS OF PLASMAS | 2013年 / 20卷 / 12期

关键词：

PARTICLE-IN-CELL; ELECTRON-ENERGY; RF DISCHARGE; COEFFICIENTS; TRANSITION; TRANSPORT; GASES;

D O I：

10.1063/1.4859155

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Based on a theoretical argument from fundamental kinetic theory, by way of simple worked examples, and through the use of particle-in-cell simulations of capacitively coupled plasmas, we demonstrate that conventional methods for calculating the momentum transfer collision frequency in low-pressure plasmas can be seriously erroneous. This potentially plays an important and previously unconsidered role in many low-pressure discharges, and at least in part provides a possible explanation for anomalous behaviour often encountered in these plasmas. (C) 2013 AIP Publishing LLC.

引用

页数：4

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