CHARACTERIZATION OF LOW-PRESSURE HIGH-FREQUENCY PLASMAS BY DC PROBE MEASUREMENTS

被引：0
|
作者：
FRANZREB, K
FUCHS, A
OECHSNER, H
机构：
来源：
PLASMA SURFACE ENGINEERING, VOLS 1 AND 2 | 1989年
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：99 / 105
页数：7
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