DOUBLE-LAYER ELLIPSOMETRY - AN EFFICIENT NUMERICAL-METHOD FOR DATA-ANALYSIS

An efficient numerical inversion procedure for the analysis of ellipsometric data of double layer samples is described. It may be considered as a generalization of the well known Reinberg method, widely used for data reduction with single transparent films. Provided one of the films is transparent and we seek its thickness together with any other configuration unknown, the numerical method proposed leads to a simple and unified one-dimensional root-finding numerical scheme which solves all the different practical cases that may arise. Useful graphical procedures for the analysis of double-layer ellipsometric results are presented as a corollary.