DOUBLE-LAYER ELLIPSOMETRY - AN EFFICIENT NUMERICAL-METHOD FOR DATA-ANALYSIS

被引：11
|
作者：
BOSCH, S
机构：
[1] Laboratori d'Optica, Departament de Física Aplicada i Electrònica, Universität de Barcelona, 08028 Barcelona
来源：
SURFACE SCIENCE | 1993年 / 289卷 / 03期
关键词：
D O I：
10.1016/0039-6028(93)90672-7
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
An efficient numerical inversion procedure for the analysis of ellipsometric data of double layer samples is described. It may be considered as a generalization of the well known Reinberg method, widely used for data reduction with single transparent films. Provided one of the films is transparent and we seek its thickness together with any other configuration unknown, the numerical method proposed leads to a simple and unified one-dimensional root-finding numerical scheme which solves all the different practical cases that may arise. Useful graphical procedures for the analysis of double-layer ellipsometric results are presented as a corollary.
引用
收藏
页码：411 / 417
页数：7
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