GLOW-DISCHARGE OPTICAL SPECTROSCOPY AS AN ANALYTICAL DEPTH PROFILING TECHNIQUE

被引：17
|
作者：
GREENE, JE
SEQUEDAOSORIO, F
NATARAJAN, BR
机构：
[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期
关键词：
D O I：
10.1116/1.568792
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：366 / 369
页数：4
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