GLOW-DISCHARGE OPTICAL SPECTROSCOPY AS AN ANALYTICAL DEPTH PROFILING TECHNIQUE

被引：17
|
作者：
GREENE, JE
SEQUEDAOSORIO, F
NATARAJAN, BR
机构：
[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期
关键词：
D O I：
10.1116/1.568792
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：366 / 369
页数：4
相关论文
共 50 条
  • [31] GLOW-DISCHARGE TECHNIQUES IN ANALYTICAL-CHEMISTRY
    HARRISON, WW
    BARSHICK, CM
    KLINGLER, JA
    RATLIFF, PH
    MEI, Y
    ANALYTICAL CHEMISTRY, 1990, 62 (18) : A943 - A949
  • [32] PULSED ATOMIZATION BY CATHODIC SPUTTERING IN A GLOW-DISCHARGE - A TRACE-ANALYTICAL TECHNIQUE
    CHAKRABARTI, CL
    HEADRICK, KL
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1988, 195 : 107 - ANYL
  • [33] Analytical criteria for controlling glow-discharge nitriding
    Pastukh, I. M.
    Sokolova, G. N.
    TECHNICAL PHYSICS, 2016, 61 (11) : 1661 - 1667
  • [34] ROLE OF DEPTH RESOLUTION IN QUANTITATIVE GLOW-DISCHARGE OPTICAL-EMISSION SPECTROMETRY DEPTH ANALYSIS
    QUENTMEIER, A
    JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1994, 9 (03) : 355 - 361
  • [35] Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy
    Schubert, C.
    Hoffmann, V.
    Kuemmel, A.
    Sinn, J.
    Haertel, M.
    Reuther, A.
    Thomalla, M.
    Gemming, T.
    Eckert, J.
    Leyens, C.
    JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 2016, 31 (11) : 2207 - 2212
  • [36] The impact of molecular emission in compositional depth profiling using Glow Discharge-Optical Emission Spectroscopy
    Bengtson, Arne
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2008, 63 (09) : 917 - 928
  • [37] SURFACE-ANALYSIS - GLOW-DISCHARGE SPECTROSCOPY
    MARSHALL, K
    VALENSI, D
    MATERIALS WORLD, 1995, 3 (10) : 471 - 473
  • [38] DEPTH PROFILING OF FRICTIONAL BRASS COATED STEEL SAMPLES BY GLOW-DISCHARGE MASS-SPECTROMETRY
    BEHN, U
    GERBIG, FA
    ALBRECHT, H
    FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1994, 349 (1-3): : 209 - 210
  • [39] DEPTH PROFILING OF THIN-FILMS USING A GRIMM-TYPE GLOW-DISCHARGE LAMP
    BENGTSON, A
    DANIELSSON, L
    THIN SOLID FILMS, 1985, 124 (3-4) : 231 - 236
  • [40] GLOW-DISCHARGE
    HIROSE, M
    SEMICONDUCTORS AND SEMIMETALS, 1984, 21 : 9 - 39
12345