INVESTIGATION OF THE INTERFACE CHEMISTRY OF TITANIUM TUNGSTEN SCHOTTKY-BARRIER CONTACTS TO SILICON BY AUGER-SPECTROSCOPY

被引：0

作者：

LEWIS, JE ^{[1
]}

ABOELFOTOH, MO ^{[1
]}

HO, PS ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573363

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：971 / 972

页数：2

共 47 条

[41] AN AES-XPS STUDY OF THE CHEMISTRY OF PALLADIUM ON HYDROGENATED AMORPHOUS-SILICON SCHOTTKY-BARRIER SOLAR-CELLS
THOMAS, JH
CARLSON, DE
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (02) : 415 - 420
[42] X-RAY PHOTOEMISSION SPECTROSCOPY INVESTIGATION OF SCHOTTKY-BARRIER FORMATION IN A COPOLYMER OF PYRROLE AND N-METHYLPYRROLE
OGAMA, T
KOEZUKA, H
JOURNAL OF APPLIED PHYSICS, 1984, 56 (04) : 1036 - 1038
[43] INVESTIGATION OF A HIGH-RESISTIVITY SURFACE-LAYER IN ELECTRON-IRRADIATED SILICON BY SCHOTTKY-BARRIER CAPACITANCE MEASUREMENTS
GERASIMENKO, NN
DOBROVOLSKII, PP
KIBALINA, NP
STAS, VF
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 47 (01): : K91 - K94
[44] AN INVESTIGATION OF THE CHEMISTRY OF THE DIELECTRIC FECOTB INTERFACE BY X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON SPECTROSCOPY
STICKLE, WF
COULMAN, D
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1128 - 1131
[45] CHEMICAL INTERACTIONS AND SCHOTTKY-BARRIER DETERMINATIONS AT THE MG/SI(100) INTERFACE STUDIED USING X-RAY PHOTOELECTRON-SPECTROSCOPY
VANBUUREN, MRJ
GRIFFITHS, CL
VANKEMPEN, H
SURFACE SCIENCE, 1994, 314 (02) : 172 - 178
[46] X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF SCHOTTKY-BARRIER FORMATION AND THERMAL-STABILITY OF THE LAB6/GAAS(001) C (4X4) INTERFACE
YOKOTSUKA, T
NARUSAWA, T
UCHIDA, Y
NAKASHIMA, H
APPLIED PHYSICS LETTERS, 1987, 50 (10) : 591 - 593
[47] Interfacial Chemistry-Induced Modulation of Schottky Barrier Heights: In Situ Measurements of the Pt-Amorphous Indium Gallium Zinc Oxide Interface Using X-ray Photoelectron Spectroscopy
Flynn, Brendan T.
Oleksak, Richard P.
Thevuthasan, Suntharampillai
Herman, Gregory S.
ACS APPLIED MATERIALS & INTERFACES, 2018, 10 (04) : 4333 - 4340

← 1 2 3 4 5 →