HYDROCARBON FORMATION DUE TO HYDROGEN-ION IMPACT ON AMORPHOUS HYDROGENATED CARBON-FILMS

被引:9
|
作者
DAVIS, JW [1 ]
HAASZ, AA [1 ]
机构
[1] UNIV TORONTO,CTR NUCL ENGN,DOWNSVIEW M3H 5T6,ONTARIO,CANADA
关键词
D O I
10.1016/0022-3115(87)90537-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:349 / 351
页数:3
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