CHEMICAL EROSION OF AMORPHOUS HYDROGENATED CARBON-FILMS BY ATOMIC AND ENERGETIC HYDROGEN

被引：125
|
作者：
VIETZKE, E [1 ]
FLASKAMP, K [1 ]
PHILIPPS, V [1 ]
ESSER, G [1 ]
WIENHOLD, P [1 ]
WINTER, J [1 ]
机构：
[1] FORSCHUNGSZENTRUM JULICH, ASSOC EURATOM, INST PLASMAPHYS, D-5170 JULICH 1, FED REP GER
来源：
JOURNAL OF NUCLEAR MATERIALS | 1987年 / 145卷
关键词：
CARBON - Erosion - FILMS - Amorphous - GLOW DISCHARGES - HYDROGEN;
D O I：
10.1016/0022-3115(87)90378-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The chemical erosion of amorphous hydrogenated carbon films by thermal and energetic hydrogen (deuterium) impact has been studied using atomic and ion beam techniques. The samples were produced during the routine carbonization procedure in TEXTOR as well as in a simulation vessel. Energetic hydrogen ions react with these films forming predominantly CH//4 with smaller contributions of higher hydrocarbons. The temperature dependence of the erosion is similar to that of the reaction with thermal atoms. The overall reaction rate is only about twice that of thermal hydrogen exposure. These results agree reasonably well with measurements on the erosion of carbonized TEXTOR surfaces by particles from a RG-glow discharge in hydrogen.
引用
收藏
页码：443 / 447
页数：5
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