HYDROCARBON FORMATION DUE TO HYDROGEN-ION IMPACT ON AMORPHOUS HYDROGENATED CARBON-FILMS

被引:9
|
作者
DAVIS, JW [1 ]
HAASZ, AA [1 ]
机构
[1] UNIV TORONTO,CTR NUCL ENGN,DOWNSVIEW M3H 5T6,ONTARIO,CANADA
关键词
D O I
10.1016/0022-3115(87)90537-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:349 / 351
页数:3
相关论文
共 50 条
  • [41] PLASMA DEPOSITION OF AMORPHOUS HYDROGENATED CARBON-FILMS ON III-V SEMICONDUCTORS
    POUCH, JJ
    WARNER, JD
    LIU, DC
    ALTEROVITZ, SA
    THIN SOLID FILMS, 1988, 157 (01) : 97 - 104
  • [42] RAMAN-SPECTROSCOPY ON NITROGEN-INCORPORATED AMORPHOUS HYDROGENATED CARBON-FILMS
    MARIOTTO, G
    FREIRE, FL
    ACHETE, CA
    THIN SOLID FILMS, 1994, 241 (1-2) : 255 - 259
  • [43] CONFIGURATION OF HYDROGEN IN SP(3)-RICH AMORPHOUS HYDROGENATED CARBON-FILMS PREPARED BY RF MAGNETRON SPUTTERING OF GRAPHITE
    TOGUCHI, M
    HIGA, A
    SHIMA, T
    MIYAZATO, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1994, 33 (5B): : L747 - L750
  • [44] STRUCTURE OF ION-PLATED AMORPHOUS HYDROGENATED CARBON-FILMS INVESTIGATED BY ELECTRON-ENERGY LOSS SPECTROSCOPY
    MUHLING, I
    BEWILOGUA, K
    BREUER, K
    THIN SOLID FILMS, 1990, 187 (01) : 65 - 75
  • [45] CHARACTERIZATION OF PLASMA-DEPOSITED AMORPHOUS HYDROGENATED CARBON-FILMS BY NEUTRON REFLECTIVITY
    GRUNDY, MJ
    RICHARDSON, RM
    ROSER, SJ
    BEAMSON, G
    BRENNAN, WJ
    HOWARD, J
    ONEIL, M
    PENFOLD, J
    SHACKLETON, C
    WARD, RC
    THIN SOLID FILMS, 1989, 172 (02) : 269 - 282
  • [46] AMORPHOUS HYDROGENATED CARBON-FILMS ON SEMICONDUCTORS .2. MICROSTRUCTURAL PROPERTIES OF THE INTERFACE
    WITTMER, M
    UGOLINI, D
    EITLE, J
    OELHAFEN, P
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 48 (06): : 559 - 566
  • [47] ANTIFERROMAGNETISM IN AMORPHOUS CARBON-FILMS
    MACFARLANE, JM
    MCLINTOCK, IS
    ORR, JC
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1973, 55 (01): : 273 - 278
  • [48] GRAPHITIZATION OF AMORPHOUS DIAMONDLIKE CARBON-FILMS BY ION-BOMBARDMENT
    GONZALEZHERNANDEZ, J
    ASOMOZA, R
    REYESMENA, A
    RICKARDS, J
    CHAO, SS
    PAWLIK, D
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1798 - 1802
  • [49] Ion-implantation into amorphous hydrogenated carbon films
    Khan, RUA
    Anguita, JV
    Silva, SRP
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2000, 276 (1-3) : 201 - 205
  • [50] Formation of hard amorphous hydrogenated carbon films with low hydrogen concentration and their erosion in air
    Maruyama, K
    Jacob, W
    Roth, J
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (2A): : 788 - 793